Metal and Compound Powders
Under DevelopmentHigh Purity Chloride
JX Metals Corporation Group has an extensive lineup of chlorides including those of molybdenum (Mo), tungsten (W), cobalt (Co), tantalum (Ta), and niobium (Nb). All are high-purity metal chlorides with purity from 3N (99.9%) to 6N (99.9999%).
In addition to CVD and ALD semiconductor processes, these are used in catalysts, chemical synthesis, coatings, and as additives in multi-layered ceramic capacitors (MLCC).
| Product Name | Typical Applications | |||||
|---|---|---|---|---|---|---|
| CVD/ALD for semiconductors | Catalysts | Chemical synthesis | Coatings | Additives in multi-layered ceramic capacitors | ||
| MoCl5 | Molybdenum pentachloride | 〇 | 〇 | |||
| WCl5 | Tungsten pentachloride | 〇 | ||||
| WCl6 | Tungsten hexachloride | 〇 | 〇 | 〇 | ||
| CoCl2 | Cobalt dichloride | 〇 | ||||
| TaCl5 | Tantalum pentachloride | 〇 | 〇 | 〇 | 〇 | |
| NbCl5 | Niobium pentachloride | 〇 | 〇 | 〇 | 〇 | 〇 |
- Chlorides and oxychlorides besides those listed above are also available.
The listed products are also sold by TANIOBIS GmbH.
Contact Information
From the Web
Inquiries accepted 24 hours a day
By telephone
- Department name
- Business Development Department, Tantalum and Niobium Division
Calls accepted from 9:00 a.m. to 5:50 p.m. JST (except weekends and holidays)