Sputtering Targets for Flat Panel Displays
IZO Sputtering Target for OLED (IR transparent electrode)
Features
IZO (Indium-Zinc-Oxide) is our proprietary transparent conductive film material, ideal as an electrode material in OLED panels and other next-generation display panels. It has the following advantages for customers.
- Low resistivity and high transparency in low-temperature deposition
- Readily adopted on organic substrate or organic layer
- Low particle levels and nodule-free structure
- Contributes to reducing maintenance and raising yield
- Amorphous stability and excellent surface smoothness
- Enables easy lamination with upper and lower films
- Excellent etching properties
- Contributes to current leak protection and shortening of tact time
ITO and IZO basic properties compared
| Target | Film resistivity [mΩ/cm] |
Transmittance@550nm [%] |
Arcing | Amorphous stability | Film surface roughness | Etching rate | |
|---|---|---|---|---|---|---|---|
| Ra[nm] | Rz[nm] | ||||||
| ITO | 1.07 | 77.9 | Normal | Normal | 2.24 | 34.2 | Normal |
| IZO | 0.41 | 83.1 | Low | Good | 0.52 | 5.2 | Fast |
- All data are for as-depo film; low resistivity and transparency are for 55 nm film thickness; surface roughness is for 130 nm thickness.
Applications
Transparent conductive films
Technology and Properties
| Purity | 3N |
|---|---|
| Shapes | All sputtering equipment and all sizes can be used, whether for rotary or planar type. |
| Composition | Standard zinc oxide concentration 10.7wt% |
ITO and IZO nodule/arcing performance compared
IZO enables particle levels to be minimized due to extremely low arcing as a result of the nodule-free structure.
ITO and IZO electrical conductivity and optical properties compared
IZO achieves properties superior to ITO in room temperature deposition and low-temperature annealing.
XRD pattern IZO film and ITO film
IZO enables high-quality film with amorphous stability.
TEM image of IZO film
IZO enables high-quality film with amorphous stability.
IZO enables high-quality film with amorphous stability.
ITO and IZO bending properties compared
IZO offers superior bendability.
Contact Information
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